Moving Polymer Waveguides and Latching Actuator for 2 × 2 MEMS Optical Switch
نویسنده
چکیده
We describe a novel type of MEMS optical switch 4 based on moving waveguide which has merits inherited from 5 both MEMS and integrated optics technologies. It provides an 6 expandable 2 × 2 switching capability, a first in this category of 7 switches. The switch is built by assembling independently opti8 mized latching silicon actuator and soft polymer waveguides. The 9 actuator is based on two new structures: a microhinge, dubbed 10 the fork hinge, and a latching structure using a precompressed 11 microspring. The mechanical switching speed was measured below 12 0.5 ms. The complex polymer waveguide structure was thoroughly 13 characterized to obtain all the components of the optical loss. 14 This analysis allowed us to estimate robustly the insertion loss 15 of the assembled optical switch below 3 dB and to identify the 16 possibilities to improve this figure. [2008-0142] 17
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